Rochester Imaging Technology Corporation

A Leading Provider of Components and Turnkey Solutions for the Industrial Imaging Market



Navitar Deep UV Zoom Lens

The Industry's ONLY Deep UV Solution

Navitar developed the NanoVue 248nm 4X Deep UV Zoom lens to meet the need for extended resolution limits for optical inspection.


The NanoVue optical system works in deep ultraviolet (DUV) light, enabling detection and characterization of yield critical defects while effectively doubling the resolution limit of conventional visible light microscopes.


• Inspection sensitivity for 90 nm.

• Zoom range of 75X - 300X when coupled with 100X objective.

• 0.15 - 0.037 mm FOV with 2/3" format sensor and 100X objective.

• Optical inspection to under 0.1 um using Deep UV objectives.

• Industry's only Deep UV Zoom solution.


The NanoVue Zoom lens is ideal for new OEM product development and integration into DUV instruments that require higher throughput, allowing customers to quickly develop new, flexible automated instruments that are feature rich, lower in cost and have smaller footprints.

Rochester Imaging Technology Corporation

10 Old Hojack Lane  STE 101-102

Hilton, NY 14468-1150

(585) 672-5504   fax: (585) 298-9517

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